Laser beam quality measurement by micro lens array method

In the traditional laser beam quality measurement, the lens transform method is used to obtain the information of the multi spot, and can only evaluate the beam quality of a continuous or high repetition rate laser, the evaluation speed is slow and the real-time performance is poor. A micro lens array method is proposed, which samples the laser spot only once and obtains all the spot information, the intensity data and phase distribution of the laser beam are determined by reconstructing the laser wave front, then calculates the beam quality parameters of laser beam according to the Wegener method. According to the ISO15367 standard, designs and implements a beam quality measurement system based on micro lens array method, which has the advantages of small size, fast measurement speed and high accuracy. The test shows that the measurement accuracy of the beam quality factor is 5%, Laser beam quality factor, beam width, and beam divergence angle parameter values can be digitized, Intensity and phase distribution of laser beam can be displayed directly, comprehensive evaluation of laser beam quality is realized.